GAS-PHASE CHEMISTRY IN THE PROCESSING OF MATERIALS FOR THE SEMICONDUCTOR INDUSTRY

被引：19

作者：

RYAN, KR

PLUMB, IC

机构：

来源：

CRC CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES | 1988年 / 15卷 / 02期

关键词：

D O I：

10.1080/10408438808243737

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

引用

页码：153 / 200

页数：48

共 191 条

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