SUPPRESSED PHOTOCURRENT MULTIPLE-QUANTUM-WELL OPTICAL MODULATORS BY PROTON IMPLANTATION

被引：12

作者：

WOODWARD, TK ^{[1
]}

TELL, B ^{[1
]}

KNOX, WH ^{[1
]}

STARK, JB ^{[1
]}

机构：

[1] AT&T BELL LABS,MURRAY HILL,NJ 07974

来源：

APPLIED PHYSICS LETTERS | 1992年 / 60卷 / 06期

关键词：

D O I：

10.1063/1.106555

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We investigate the reduction of power dissipation in absorptive semiconductor optical modulators via reduction in photocurrent. We present experimental results for proton implantation of p-i-n -multiple-quantum-well modulators to levels of 1 X 10(12), 1 X 10(13), and 1 X 10(14) cm-2. We find that photocurrent can be significantly reduced with moderate reduction in modulation performance relative to the unimplanted device. Application to asymmetric self-electro-optic devices is demonstrated.

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页码：742 / 744

页数：3

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