CHARACTERISTICS OF SURFACE-ACOUSTIC-WAVE ON AIN THIN-FILMS

被引：16

作者：

KOBAYASHI, Y

TANAKA, N

OKANO, H

TAKEUCHI, K

USUKI, T

SHIBATA, K

机构：

[1] New Materials Research Center, SANYO Electric Co. Ltd., Hirakata, Osaka, 573

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1995年 / 34卷 / 5B期

关键词：

AIN; FILM; SAW; LEAKY WAVE; RAYLEIGH WAVE; LOVE WAVE; PHASE VELOCITY; PROPAGATION LOSS; COUPLING COEFFICIENT;

D O I：

10.1143/JJAP.34.2668

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A surface acoustic wave (SAW) on a (00.1) pane of hexagonal aluminum nitride (AIN) deposited on R-plane sapphire ((1 ($) over bar 1.2)Al2O3) with an inclination of about 26 degrees to the substrate was analyzed. A Rayleigh wave and shear-horizontal-type (SH-type) wave were found. The phase velocity of these was 5400-5800 m/s and 6100-6600 m/s, respectively. To confirm this results, the propagating characteristics of both SAW modes were measured by input admittance of single interdigital transducers (IDT) and by transmission characteristics between two IDTs. The phase velocity of the Rayleigh wave and the SH-type wave was 5600 m/s and 6500 m/s, respectively, and the propagation loss was 0 dB/lambda and 0.04 dB/lambda, respectively. These measured characteristics approximately agree with the results of the simulation.

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页码：2668 / 2673

页数：6

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