AN ANALYSIS OF THE DERIVATIVE WEIGHT-GAIN SIGNAL FROM MEASURED CRYSTAL SHAPE - IMPLICATIONS FOR DIAMETER CONTROL OF GAAS

被引：12

作者：

JORDAN, AS

CARUSO, R

VONNEIDA, AR

机构：

来源：

BELL SYSTEM TECHNICAL JOURNAL | 1983年 / 62卷 / 02期

关键词：

D O I：

10.1002/j.1538-7305.1983.tb03107.x

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：477 / 498

页数：22

共 22 条

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[3] WEIGHING METHOD OF AUTOMATIC CZOCHRALSKI CRYSTAL-GROWTH .2. CONTROL EQUIPMENT [J].

BARDSLEY, W ;

HURLE, DTJ ;

JOYCE, GC ;

WILSON, GC .

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[4]

COLE M, 1976, 1 ECCG ZUR

[5]

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[6]

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[7] CONTROL OF DIAMETER IN CZOCHRALSKI AND RELATED CRYSTAL-GROWTH TECHNIQUES [J].

HURLE, DTJ .

JOURNAL OF CRYSTAL GROWTH, 1977, 42 (DEC) :473-482

[8] AN EVALUATION OF THE THERMAL AND ELASTIC-CONSTANTS AFFECTING GAAS CRYSTAL-GROWTH [J].

JORDAN, AS .

JOURNAL OF CRYSTAL GROWTH, 1980, 49 (04) :631-642

[9]

LORENZINI RE, 1974, SOLID STATE TECHNOL, V17, P33

[10]

MAKSOUDIAN YL, 1969, PROBABILITY STATISTI, P123

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