THE ATOMIC FORCE MICROSCOPE USED AS A POWERFUL TOOL FOR MACHINING SURFACES

被引：94

作者：

JUNG, TA

MOSER, A

HUG, HJ

BRODBECK, D

HOFER, R

HIDBER, HR

SCHWARZ, UD

机构：

[1] Institut für Physik der Universität Basel, CH-4056 Basel

来源：

ULTRAMICROSCOPY | 1992年 / 42卷

关键词：

D O I：

10.1016/0304-3991(92)90464-U

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Different methods of creating and imaging small structures with an atomic force microscope (AFM) are reported. We show indentations, lines and more complex patterns created with three different techniques. On polymer surfaces we are able to reproducibly create structures with typical sizes down to 50 nm. This work constitutes an example of using the AFM for controlled machining of the surface. We discuss applications of the described method in basic and technological research.

引用

页码：1446 / 1451

页数：6