SIMULATIONS OF METALORGANIC CHEMICAL VAPOR-DEPOSITION AND OF CLUSTER FORMATION ON GAAS

被引：5

作者：

MENON, M ^{[1
]}

ALLEN, RE ^{[1
]}

机构：

[1] TEXAS A&M UNIV,DEPT PHYS,CTR THEORET PHYS,COLLEGE STN,TX 77843

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 04期

关键词：

D O I：

10.1116/1.584634

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：729 / 732

页数：4

共 24 条

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