MICROSTRUCTURE OF THE PD/A-SI-H INTERFACE

被引:3
作者
LOSCH, W
NIEHUS, H
机构
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D O I
10.1016/0022-3093(85)90834-8
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
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页码:1019 / 1022
页数:4
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