SURFACE-LAYER CHARACTERISTICS OF ION-IMPLANTED METALS

被引:15
作者
IWAKI, M
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D O I
10.1016/0040-6090(83)90249-3
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:223 / 231
页数:9
相关论文
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    TAKAHASHI, K
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    IWAKI, M
    [J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 1009 - 1015
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