QUASI-CRYSTALLINE (AL,PD)-PHASE IN DILUTE AL-SI-V-PD FILMS FOR USE AS RELIABLE METALLIZATIONS IN ULTRALARGE SCALE INTEGRATION

被引：2

作者：

DIRKS, AG

DEVEIRMAN, AEM

机构：

[1] Philips Research Laboratories, 5656 AA Eindhoven

来源：

SCRIPTA METALLURGICA ET MATERIALIA | 1993年 / 29卷 / 08期

关键词：

D O I：

10.1016/0956-716X(93)90170-W

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：1017 / 1022

页数：6

共 28 条

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