CHARACTERIZATION OF MICROCRYSTALLINITY IN HYDROGENATED SILICON THIN-FILMS

被引：11

作者：

GODET, C

MARCHON, B

SCHMIDT, MP

机构：

[1] CNRS,SPECTROCHIM INFRAROUGE & RAMAN LAB,F-94320 THIAIS,FRANCE

[2] ECOLE POLYTECH,PHYS MAT CONDENSEE LAB,F-91128 PALAISEAU,FRANCE

来源：

关键词：

D O I：

10.1016/0040-6090(87)90068-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：227 / 242

页数：16

共 36 条

[1] VIBRATIONAL PROPERTIES OF AMORPHOUS SI AND GE
ALBEN, R
WEAIRE, D
SMITH, JE
BRODSKY, MH
[J]. PHYSICAL REVIEW B, 1975, 11 (06) : 2271 - 2296
[2] EFFECT OF STATIC UNIAXIAL STRESS ON RAMAN SPECTRUM OF SILICON
ANASTASSAKIS, E
PINCZUK, A
BURSTEIN, E
POLLAK, FH
CARDONA, M
[J]. SOLID STATE COMMUNICATIONS, 1970, 8 (02) : 133 - +
[3] Azaroff LV, 1968, ELEMENTS XRAY CRYSTA
[4] BOTTGER H, 1983, PRINCIPLES THEORY LA, P167
[5] SOLID-PHASE GROWTH OF SILICON AND GERMANIUM
BOURGOIN, JC
ASOMOZA, R
[J]. JOURNAL OF CRYSTAL GROWTH, 1984, 69 (2-3) : 489 - 498
[6] BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556
[7] AMORPHOUS TO MICROCRYSTALLINE TRANSITIONS IN SI FILMS
BUSTARRET, E
RANCHOUX, B
HAMDI, H
DENEUVILLE, A
HUANT, S
DEPELSENAIRE, P
[J]. PHYSICA B & C, 1983, 117 (MAR): : 950 - 952
[8] CAMPBELL I, 1986, 18TH P INT C PHYS SE, P1357
[9] THE EFFECTS OF MICROCRYSTAL SIZE AND SHAPE ON THE ONE PHONON RAMAN-SPECTRA OF CRYSTALLINE SEMICONDUCTORS
CAMPBELL, IH
FAUCHET, PM
[J]. SOLID STATE COMMUNICATIONS, 1986, 58 (10) : 739 - 741
[10] AN INVESTIGATION OF MICROCRYSTALLINE FILMS PRODUCED BY A DC-GLOW DISCHARGE IN SILANE AND HYDROGEN
CARLSON, DE
SMITH, RW
[J]. JOURNAL OF ELECTRONIC MATERIALS, 1982, 11 (04) : 749 - 760