AN INVESTIGATION OF MICROCRYSTALLINE FILMS PRODUCED BY A DC-GLOW DISCHARGE IN SILANE AND HYDROGEN

被引：6

作者：

CARLSON, DE

SMITH, RW

机构：

来源：

关键词：

D O I：

10.1007/BF02672393

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：749 / 760

页数：12

共 12 条

[1] THE ROLE OF HYDROGEN IN HEAVILY DOPED AMORPHOUS-SILICON
CARLSON, DE
SMITH, RW
MAGEE, CW
ZANZUCCHI, PJ
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1982, 45 (01): : 51 - 68
[2] CARLSON DE, 1979, 2ND EC PHOT SOL EN C
[3] Chapman B., 1980, GLOW DISCHARGE PROCE
[4] DALAL VK, 1981, TETRAHEDRALLY BONDED, P15
[5] ELECTRICAL AND STRUCTURAL-PROPERTIES OF PHOSPHOROUS-DOPED GLOW-DISCHARGE SI-F-H AND SI-H FILMS
MATSUDA, A
YAMASAKI, S
NAKAGAWA, K
OKUSHI, H
TANAKA, K
IIZIMA, S
MATSUMURA, M
YAMAMOTO, H
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1980, 19 (06) : L305 - L308
[6] MATSUDA A, 1981, TETRAHEDRALLY BONDED
[7] NUCLEATION OF MICROCRYSTALLITES IN PHOSPHORUS-DOPED SI-H FILMS
MISHIMA, Y
HAMASAKI, T
KURATA, H
HIROSE, M
OSAKA, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1981, 20 (02) : L121 - L123
[8] MICROCRYSTALLINE STRUCTURE IN GLOW-DISCHARGE-PRODUCED SILICON FILMS
NAGATA, Y
KUNIOKA, A
YAMAZAKI, S
[J]. APPLIED PHYSICS LETTERS, 1981, 38 (03) : 142 - 143
[9] SWARTZ G, COMMUNICATION
[10] PROPERTIES OF HEAVILY DOPED GD-SI WITH LOW RESISTIVITY
USUI, S
KIKUCHI, M
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1979, 34 (01) : 1 - 1