NUCLEATION OF MICROCRYSTALLITES IN PHOSPHORUS-DOPED SI-H FILMS

被引：34

作者：

MISHIMA, Y

HAMASAKI, T

KURATA, H

HIROSE, M

OSAKA, Y

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1981年 / 20卷 / 02期

关键词：

D O I：

10.1143/JJAP.20.L121

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：L121 / L123

页数：3

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