AUTOMATED MUELLER MATRIX ELLIPSOMETRY

被引：20

作者：

HAUGE, PS ^{[1
]}

机构：

[1] IBM CORP J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

OPTICS COMMUNICATIONS | 1976年 / 17卷 / 01期

关键词：

D O I：

10.1016/0030-4018(76)90182-6

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：74 / 76

页数：3

共 12 条

[1] PHOTOMETRIC ELLIPSOMETER FOR MEASURING PARTIALLY POLARIZED-LIGHT [J].

ASPNES, DE .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1975, 65 (11) :1274-1278

[2]

ASPNES DE, TO BE PUBLISHED

[3]

Azzam R. M. A., 1973, Optics Communications, V7, P110, DOI 10.1016/0030-4018(73)90079-5

[4]

Azzam R. M. A., 1972, Optics Communications, V5, P5, DOI 10.1016/0030-4018(72)90124-1

[5] APPLICATION OF GENERALIZED ELLIPSOMETRY TO ANISOTROPIC CRYSTALS [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (02) :128-133

[6] ROTATING-COMPENSATOR FOURIER ELLIPSOMETER [J].

HAUGE, PS ;

DILL, FH .

OPTICS COMMUNICATIONS, 1975, 14 (04) :431-437

[7]

HAUGE PS, TO BE PUBLISHED

[8] NEW POLARIZATION-MODULATED LIGHT-SCATTERING INSTRUMENT [J].

HUNT, AJ ;

HUFFMAN, DR .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1973, 44 (12) :1753-1762

[9] DEFINITIONS AND CONVENTIONS IN ELLIPSOMETRY [J].

MULLER, RH .

SURFACE SCIENCE, 1969, 16 :14-&

[10] Polarization of light scattered by isotropic opalescent media [J].

Perrin, F .

JOURNAL OF CHEMICAL PHYSICS, 1942, 10 (07) :415-427

← 1 2 →