PHOTOMETRIC ELLIPSOMETER FOR MEASURING PARTIALLY POLARIZED-LIGHT

被引：27

作者：

ASPNES, DE ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1975年 / 65卷 / 11期

关键词：

D O I：

10.1364/JOSA.65.001274

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

收藏

页码：1274 / 1278

页数：5

相关论文

共 29 条

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ASPNES, DE
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[7] ANALYSIS OF SYSTEMATIC-ERRORS IN ROTATING-ANALYZER ELLIPSOMETERS
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[8] UNIFIED ANALYSIS OF ELLIPSOMETRY ERRORS DUE TO IMPERFECT COMPONENTS, CELL-WINDOW BIREFRINGENCE, AND INCORRECT AZIMUTH ANGLES
AZZAM, RMA
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[9] GENERAL TREATMENT OF EFFECT OF CELL WINDOWS IN ELLIPSOMETRY
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[10] BORN M, 1964, PRINCIPLES OPTICS, P544