LASER-INDUCED INTERFACE REACTIONS OF COPPER THIN-FILMS ON SAPPHIRE SUBSTRATES

被引：10

作者：

GODBOLE, MJ

PEDRAZA, AJ

LOWNDES, DH

KENIK, EA

机构：

[1] OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37831

[2] OAK RIDGE NATL LAB,DIV MET & CERAM,OAK RIDGE,TN 37831

来源：

JOURNAL OF MATERIALS RESEARCH | 1989年 / 4卷 / 05期

关键词：

D O I：

10.1557/JMR.1989.1202

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1202 / 1208

页数：7

共 12 条

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[3]

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ERRAKHO, L ;

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[5]

KNAPP JA, 1982, LASER ELECTRON BEAM, P402

[6] STRUCTURAL AND ELECTRON-DIFFRACTION DATA FOR SAPPHIRE (ALPHA-AL2O3) [J].

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[7] THE OXYGEN DEFECT PEROVSKITE BALA4CU5O13.4, A METALLIC CONDUCTOR [J].

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[8]

Mitchell I. V., 1984, Thin Films and Interfaces II. Proceedings of the Symposium, P189

[9] ENHANCEMENT OF THIN METALLIC FILM ADHESION FOLLOWING VACUUM ULTRAVIOLET-IRRADIATION [J].

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ELLIMAN, RG .

APPLIED PHYSICS LETTERS, 1984, 45 (02) :137-139

[10] LASER ENHANCED ADHESION OF COPPER-FILMS TO SAPPHIRE SUBSTRATES [J].

PEDRAZA, AJ ;

GODBOLE, MJ ;

KENIK, EA ;

LOWNDES, DH ;

THOMPSON, JR .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03) :1763-1767

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