STEP STRUCTURE AND INTERFACE MORPHOLOGY - ARSENIC ON VICINAL SILICON SURFACES

被引:31
作者
OHNO, TR [1 ]
WILLIAMS, ED [1 ]
机构
[1] UNIV MARYLAND,DEPT PHYS,COLLEGE PK,MD 20742
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1990年 / 8卷 / 04期
关键词
D O I
10.1116/1.584981
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:874 / 883
页数:10
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