ELECTRON EFFECTS IN MAGNETRON SPUTTERING

被引：15

作者：

GREEN, FA ^{[1
]}

CHAPMAN, BN ^{[1
]}

机构：

[1] IMPERIAL COLL,DEPT ELECT ENGN,LONDON SW7 2BT,ENGLAND

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1976年 / 13卷 / 01期

关键词：

D O I：

10.1116/1.568814

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：165 / 168

页数：4

共 12 条

[1]

CARLSTON EE, 1965, PHYSICAL REVIEW A, V139, P729

[2] ELECTRON EFFECTS IN SPUTTERING AND COSPUTTERING [J].

CHAPMAN, BN ;

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GUIMARAE.LJ .

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[3] ION ENERGIES AT CATHODE OF A GLOW DISCHARGE [J].

DAVIS, WD ;

VANDERSLICE, TA .

PHYSICAL REVIEW, 1963, 131 (01) :219-&

[4] The mechanism of electrical discharges in gases of low pressure [J].

Druyvesteyn, MJ ;

Penning, FM .

REVIEWS OF MODERN PHYSICS, 1940, 12 (02) :0087-0174

[5] CURRENT-PRESSURE TRANSITIONS IN A MAGNETICALLY SUPPORTED DC SPUTTERING SYSTEM [J].

GREEN, FA ;

CHAPMAN, BN .

APPLIED PHYSICS LETTERS, 1975, 27 (04) :189-190

[6] ABNORMAL GLOW-DISCHARGE IN MERCURY-VAPOR AND XENON [J].

HOLMES, AJT ;

COZENS, JR .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1974, 7 (12) :1723-1739

[7] THE HOLLOW-CATHODE EFFECT AND THE THEORY OF GLOW DISCHARGES [J].

LITTLE, PF ;

VONENGEL, A .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1954, 224 (1157) :209-227

[8]

MASSEY HSM, 1969, ELECTRONIC IONIC IMP, V1, P216

[9] The ionization of helium, neon, and argon by electron impact [J].

Smith, PT .

PHYSICAL REVIEW, 1930, 36 (08) :1293-1302

[10]

von Engel A., 1965, IONIZED GASES, P96

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