PREPARATION OF DOPED HYDROGENATED AMORPHOUS-SILICON FILMS BY MICROWAVE ELECTRON-CYCLOTRON-RESONANCE PLASMA DISCHARGE DEPOSITION

被引：9

作者：

KITAGAWA, M

SETSUNE, K

MANABE, Y

HIRAO, T

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 05期

关键词：

D O I：

10.1063/1.338013

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2084 / 2087

页数：4

共 10 条

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[9]

Tauc J., 1974, AMORPHOUS LIQUID SEM, P159, DOI DOI 10.1007/978-1-4615-8705-7

[10] A-SIC-H-A-SI-H HETEROJUNCTION SOLAR-CELL HAVING MORE THAN 7.1-PERCENT CONVERSION EFFICIENCY [J].

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