A METHOD FOR DETERMINING THE FAST NEUTRAL PORTION OF ION-BEAMS

被引：1

作者：

NEDIALKOV, M

ZINENKO, V

KARPUZOV, D

机构：

[1] RUSSIAN ACAD SCI,INST MICROELECTR TECHNOL & HIGH PURITY MAT,CHERNOGOLOVKA 142432,RUSSIA

[2] BULGARIAN ACAD SCI,INST ELECTR,BU-1784 SOFIA,BULGARIA

来源：

VACUUM | 1995年 / 46卷 / 12期

关键词：

D O I：

10.1016/0042-207X(95)00170-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A method based on a thermocouple detector measuring simultaneously the total flux of energetic particles and the portion of the charged particles is proposed and studied. These data allow the neutral fraction of the ion beam to be easily calculated and the fraction is determined for different values of the working gas pressure in Ar and SF,. The results obtained are in good agreement with the theoretical model, for an ion beam accelerating bias of 500 V.

引用

页码：1455 / 1457

页数：3

共 4 条

[1] REACTIVE AND CHEMICALLY ASSISTED ION-BEAM ETCHING OF SI AND SIO2 [J].