A LOW-ENERGY FAST-ATOM BEAM SOURCE

被引：1

作者：

GORBATOV, YB

VYATKIN, AF

ZINENKO, VI

机构：

[1] Institute of Microelectronics Technology and High Purity Materials, USSR Academy of Sciences, 142432 Chernogolovka, Moscow District

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1991年 / 55卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(91)96187-P

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The characteristics of a low-energy (1-1.5 keV) fast-atom beam (FAB) source have been investigated. The FAB was produced by resonance charge exchange of argon ions extracted from an rf multiaperture ion source on the gas flowing out of the source. A 20 mm diameter, 1.5 keV argon FAB with an equivalent current density of 0.9 mA/cm2 has been obtained.

引用

页码：328 / 330

页数：3

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