A COMPARISON OF ION AND FAST ATOM BEAM REDUCTION IN TIO2

被引：100

作者：

SAIED, SO

SULLIVAN, JL

CHOUDHURY, T

PEARCE, CG

机构：

来源：

VACUUM | 1988年 / 38卷 / 8-10期

关键词：

D O I：

10.1016/0042-207X(88)90492-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：917 / 922

页数：6

共 26 条

[1] X-RAY PHOTOELECTRON-SPECTROSCOPY OF IRON-OXYGEN SYSTEMS [J].

ALLEN, GC ;

CURTIS, MT ;

HOOPER, AJ ;

TUCKER, PM .

JOURNAL OF THE CHEMICAL SOCIETY-DALTON TRANSACTIONS, 1974, (14) :1525-1530

[2]

[Anonymous], 1981, SPUTTERING PARTICLE

[3] DAMAGE EFFECTS OF ION ATOM BEAM MILLING ON MNOS (AL/SI3N4/SIO2/SI) CAPACITORS [J].

BANGERT, U ;

BELSON, J ;

WILSON, IH .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 1 (2-3) :370-373

[4]

BROWN A, 1984, J CHEM SOC CHEM COM, V24, P1684

[5] KINETICS OF SPUTTER-ENHANCED SURFACE SEGREGATION AT A NI/AG INTERFACE [J].

FINE, J ;

ANDREADIS, TD ;

DAVARYA, F .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :507-508

[6] ATOM BEAM SOURCE [J].

FRANKS, J .

VACUUM, 1984, 34 (1-2) :259-261

[7] CHARACTERIZATION OF NITRIDE COATINGS BY AUGER-ELECTRON SPECTROSCOPY AND X-RAY PHOTOELECTRON-SPECTROSCOPY [J].

HOFMANN, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06) :2789-2796

[8] PREFERENTIAL SPUTTERING OF PTSI, NISI2, AND AGAU [J].

HOLLOWAY, PH ;

BHATTACHARYA, RS .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03) :444-448

[9] ESCA STUDIES ON CHANGES IN SURFACE COMPOSITION UNDER ION-BOMBARDMENT [J].

HOLM, R ;

STORP, S .

APPLIED PHYSICS, 1977, 12 (01) :101-112

[10]

Kelly R., 1973, Radiation Effects, V19, P39, DOI 10.1080/00337577308232213

← 1 2 3 →