A COMPARISON OF ION AND FAST ATOM BEAM REDUCTION IN TIO2

被引：100

作者：

SAIED, SO

SULLIVAN, JL

CHOUDHURY, T

PEARCE, CG

机构：

来源：

VACUUM | 1988年 / 38卷 / 8-10期

关键词：

D O I：

10.1016/0042-207X(88)90492-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：917 / 922

页数：6

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