ENERGY-DEPENDENCE OF THE SPUTTERING YIELD OF SILICON BOMBARDED WITH NEON, ARGON, KRYPTON, AND XENON IONS

被引：165

作者：

ZALM, PC

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 05期

关键词：

D O I：

10.1063/1.332340

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2660 / 2666

页数：7

共 25 条

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