POROUS SILICON FORMATION AND ELECTROPOLISHING OF SILICON BY ANODIC POLARIZATION IN HF SOLUTION

被引：249

作者：

ZHANG, XG ^{[1
]}

COLLINS, SD ^{[1
]}

SMITH, RL ^{[1
]}

机构：

[1] MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139

来源：

关键词：

D O I：

10.1149/1.2096961

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1561 / 1565

页数：5

共 22 条

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