TIME-RESOLVED DETECTION OF CU ATOMS DURING PHOTOCHEMICAL LASER METAL VAPOR-DEPOSITION

被引:18
作者
MARINERO, EE
JONES, CR
机构
关键词
D O I
10.1063/1.448437
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:1608 / 1609
页数:2
相关论文
共 10 条
[1]   LASER STUDIES OF ELECTRONIC-ENERGY TRANSFER IN ATOMIC COPPER [J].
CHEN, HL ;
ERBERT, G .
JOURNAL OF CHEMICAL PHYSICS, 1983, 78 (08) :4985-4990
[2]  
EHRLICH DJ, 1982, THIN SOLID FILMS, V90, P287, DOI 10.1016/0040-6090(82)90377-7
[3]   PHOTODEPOSITION OF METAL-FILMS WITH ULTRAVIOLET-LASER LIGHT [J].
EHRLICH, DJ ;
OSGOOD, RM ;
DEUTSCH, TF .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (01) :23-32
[4]   SPATIALLY DELINEATED GROWTH OF METAL-FILMS VIA PHOTOCHEMICAL PRE-NUCLEATION [J].
EHRLICH, DJ ;
OSGOOD, RM ;
DEUTSCH, TF .
APPLIED PHYSICS LETTERS, 1981, 38 (11) :946-948
[5]  
EHRLICH DJ, 1983, J VAC SCI TECNOL B, V1, P923
[6]  
EHRLICH DJ, 1981, J ELECTROCHEM SOC, V128, P2041
[7]  
HOULE FA, 1984, CLEO 84 ANAHEIM
[8]  
HOULE FA, UNPUB APPL PHYS LETT
[9]  
JONES CE, UNPUB APPL PHYS LETT
[10]  
Kitai A., 1983, Laser Diagnostics and Photochemical Processing for Semiconductor Devices. Proceedings of a Symposium, P141