OPTICAL PROFILOMETER IN WHITE-LIGHT

被引：8

作者：

GORECKI, C ^{[1
]}

TRIBILLON, G ^{[1
]}

MIGNOT, J ^{[1
]}

机构：

[1] ECOLE NATL SUPER MECAN & MICROTECH,MICROANAL SURFACES LAB,F-25030 BESANCON,FRANCE

来源：

JOURNAL OF OPTICS-NOUVELLE REVUE D OPTIQUE | 1983年 / 14卷 / 01期

关键词：

D O I：

10.1088/0150-536X/14/1/003

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：19 / 23

页数：5

共 9 条

[1] FAST VERSATILE OPTICAL PROFILOMETER [J].

ARECCHI, FT ;

BERTANI, D ;

CILIBERTO, S .

OPTICS COMMUNICATIONS, 1979, 31 (03) :263-266

[2] MEASUREMENT OF RMS ROUGHNESS, AUTOCOVARIANCE FUNCTION AND OTHER STATISTICAL PROPERTIES OF OPTICAL SURFACES USING A FECO SCANNING INTERFEROMETER [J].

BENNETT, JM .

APPLIED OPTICS, 1976, 15 (11) :2705-2721

[3] ROUGHNESS MEASUREMENTS OF METAL-SURFACES USING LASER SPECKLE [J].

FUJII, H ;

ASAKURA, T .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1977, 67 (09) :1171-1176

[4]

GORECKI C, 1983, THESIS BESANCON

[5] SOME EFFECTS OF SURFACE-ROUGHNESS ON APPEARANCE OF SPECKLE IN POLYCHROMATIC LIGHT [J].

PARRY, G .

OPTICS COMMUNICATIONS, 1974, 12 (01) :75-78

[6] NEW NONCONTACT DEVICES FOR MEASURING SMALL MICRODISPLACEMENTS [J].

SIMON, J .

APPLIED OPTICS, 1970, 9 (10) :2337-&

[7] SURFACE-ROUGHNESS MEASUREMENT USING WHITE-LIGHT SPECKLE [J].

SPRAGUE, RA .

APPLIED OPTICS, 1972, 11 (12) :2811-&

[8]

VANHERCK P, 1975, REV M, V21, P29

[9]

1979, NOTES TECHNIQUES CET, V19, P22

← 1 →