CO2-LASER CVD OF COPPER LINES WITH TWOFOLD PERIODIC STRUCTURES

A continuous wave CO2 laser beam was vertically directed onto glass substrates to deposit copper via CO2 laser CVD by decomposition of copper hexafluoroacetylacetonate. With fixed substrates deposits of volcano like shape were obtained after short irradiation times. Upon further processing the volcano structures became completely filled. With moving substrates the laser CVD process led to stripes of deposits. Their transverse and longitudinal profiles were dependent on the processing conditions: Uniform stripes were obtained as well as periodically structured traces even with twofold patterns.