IMAGING PERFORMANCE OF MULTILAYER X-RAY MIRRORS

被引：22

作者：

SPILLER, E

WILCZYNSKI, J

STEARNS, D

GOLUB, L

NYSTROM, G

机构：

[1] LAWRENCE LIVERMORE NATL LAB,LIVERMORE,CA 94550

[2] CTR ASTROPHYS,CAMBRIDGE,MA 02138

来源：

APPLIED PHYSICS LETTERS | 1992年 / 61卷 / 13期

关键词：

D O I：

10.1063/1.107522

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We analyze soft x-ray images of the solar corona, obtained on the day of the solar eclipse in July 1991, and find that the deviations of our telescope mirror from the perfect surface are less than 1 angstrom for spatial periods between 1 mum and 1 mm. Our thin film deposition technique allows us to reduce errors over larger periods to the 1 angstrom level. Thus, we are able to produce large (diameter over 20 cm) x-ray mirrors with diffraction limited resolution below 0.01 arcsec.

引用

页码：1481 / 1483

页数：3

共 21 条

[1] REDUCTION IMAGING AT 14 NM USING MULTILAYER-COATED OPTICS - PRINTING OF FEATURES SMALLER THAN 0.1-MU-M [J].

BJORKHOLM, JE ;

BOKOR, J ;

EICHNER, L ;

FREEMAN, RR ;

GREGUS, J ;

JEWELL, TE ;

MANSFIELD, WM ;

MACDOWELL, AA ;

RAAB, EL ;

SILFVAST, WT ;

SZETO, LH ;

TENNANT, DM ;

WASKIEWICZ, WK ;

WHITE, DL ;

WINDT, DL ;

WOOD, OR ;

BRUNING, JH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (06) :1509-1513

[2]

EASTMAN JM, 1978, PHYS THIN FILMS, V10, P167

[3]

GLENN P, 1990, P SOC PHOTO-OPT INS, V1333, P326, DOI 10.1117/12.22817

[4] SUB-ARCSECOND OBSERVATIONS OF THE SOLAR-X-RAY CORONA [J].

GOLUB, L ;

HERANT, M ;

KALATA, K ;

LOVAS, I ;

NYSTROM, G ;

PARDO, F ;

SPILLER, E ;

WILCZYNSKI, J .

NATURE, 1990, 344 (6269) :842-844

[5]

HAELBICH RP, 1980, SCANNED IMAGE MICROS, P413

[6] IMAGING CAPABILITIES OF NORMAL-INCIDENCE X-RAY TELESCOPES [J].

HARVEY, JE ;

ZMEK, WP ;

FTACLAS, C .

OPTICAL ENGINEERING, 1990, 29 (06) :603-608

[7] SOFT-X-RAY PROJECTION LITHOGRAPHY USING AN X-RAY REDUCTION CAMERA [J].

HAWRYLUK, AM ;

SEPPALA, LG .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06) :2162-2166

[8]

HENRY J, 1982, APL PHYS LETTT, V45, P25

[9]

KUCHEL M, 1990, P SOC PHOTO-OPT INS, V1332, P655

[10]

KURCOCK JR, 1978, PHYS THIN FILMS, V10, P261

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