共 21 条
[1]
REDUCTION IMAGING AT 14 NM USING MULTILAYER-COATED OPTICS - PRINTING OF FEATURES SMALLER THAN 0.1-MU-M
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1990, 8 (06)
:1509-1513
[2]
EASTMAN JM, 1978, PHYS THIN FILMS, V10, P167
[3]
GLENN P, 1990, P SOC PHOTO-OPT INS, V1333, P326, DOI 10.1117/12.22817
[5]
HAELBICH RP, 1980, SCANNED IMAGE MICROS, P413
[7]
SOFT-X-RAY PROJECTION LITHOGRAPHY USING AN X-RAY REDUCTION CAMERA
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1988, 6 (06)
:2162-2166
[8]
HENRY J, 1982, APL PHYS LETTT, V45, P25
[9]
KUCHEL M, 1990, P SOC PHOTO-OPT INS, V1332, P655
[10]
KURCOCK JR, 1978, PHYS THIN FILMS, V10, P261