ELECTRICAL TRANSPORT-PROPERTIES OF TRANSITION-METAL DISILICIDE FILMS

被引：66

作者：

NAVA, F

TU, KN

MAZZEGA, E

MICHELINI, M

QUEIROLO, G

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

[2] SGS MICROELECT,I-20041 AGRATE,ITALY

来源：

关键词：

D O I：

10.1063/1.338203

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1085 / 1093

页数：9

共 29 条

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