RF PLASMA DEPOSITED AMORPHOUS-CARBON FILMS - ELECTRONIC AND OPTICAL-PROPERTIES

被引：19

作者：

FABISIAK, K

ORZESZKO, S

ROZPLOCH, F

SZATKOWSKI, J

机构：

[1] Nicholas Copernicus Univ, Torun, Pol, Nicholas Copernicus Univ, Torun, Pol

来源：

关键词：

D O I：

10.1016/0022-3093(88)90453-X

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：12 / 22

页数：11

共 19 条

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WRONSKI, CR
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AUGELLI, V
LIGONZO, T
MURRI, R
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[J]. THIN SOLID FILMS, 1985, 125 (1-2) : 9 - 16
[3] BALA W, 1984, PHYS STAT SOL, V81, P579
[4] CARBON COATINGS FOR FUSION APPLICATIONS
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ROVNER, LH
CHIN, J
CHEN, KY
[J]. THIN SOLID FILMS, 1979, 63 (02) : 227 - 236
[5] CONDUCTION IN NON-CRYSTALLINE SYSTEMS .5. CONDUCTIVITY, OPTICAL ABSORPTION AND PHOTOCONDUCTIVITY IN AMORPHOUS SEMICONDUCTORS
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[J]. PHILOSOPHICAL MAGAZINE, 1970, 22 (179): : 903 - &
[6] INVESTIGATION OF HYDROCARBON-PLASMA-GENERATED CARBON-FILMS BY ELECTRON-ENERGY-LOSS SPECTROSCOPY
FINK, J
MULLERHEINZERLING, T
PFLUGER, J
SCHEERER, B
DISCHLER, B
KOIDL, P
BUBENZER, A
SAH, RE
[J]. PHYSICAL REVIEW B, 1984, 30 (08): : 4713 - 4718
[7] PROPERTIES AND APPLICATION OF HYDROGENATED AMORPHOUS-SILICON FILMS
GEIGER, J
[J]. THIN SOLID FILMS, 1985, 126 (1-2) : 1 - 10
[8] HASEGAWA S, 1982, PHIL MAG, V47, P139
[9] HOPPING CONDUCTION IN AMORPHOUS SOLIDS
HILL, RM
[J]. PHILOSOPHICAL MAGAZINE, 1971, 24 (192): : 1307 - &
[10] PROPERTIES OF HYDROGENATED AMORPHOUS-CARBON FILMS AND THE EFFECTS OF DOPING
JONES, DI
STEWART, AD
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1982, 46 (05): : 423 - 434