EFFECTS OF THE DOPANTS ON THE ELECTRICAL-CONDUCTIVITY AND HALL-MOBILITY IN SI-H, CL FILMS

被引:8
作者
AUGELLI, V [1 ]
LIGONZO, T [1 ]
MURRI, R [1 ]
SCHIAVULLI, L [1 ]
机构
[1] CTR INTERUNIV STRUTTURA MAT,UNITA GRP NAZL STRUTTURA MAT,I-70126 BARI,ITALY
关键词
ELECTRIC CONDUCTIVITY - HALL EFFECT;
D O I
10.1016/0040-6090(85)90388-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The electrical conductivity was measured as a function of the temperature in films of hydrogenated and chlorinated silicon. Phosphine and diborane were added to the gas phase in well-controlled percentages. Differences in the behavior of the activation energy of the conductivity are found according to the deposition conditions of the films. The Hall mobility varies with the doping and with the crystallite size, which in turn depends on the deposition rate.
引用
收藏
页码:9 / 16
页数:8
相关论文
共 24 条
  • [1] PHOTOCONDUCTIVITY IN AMORPHOUS SI-H-CL FILMS
    AUGELLI, V
    MURRI, R
    ALBA, N
    [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (01) : 248 - 251
  • [2] HALL-MOBILITY IN UNDOPED MICROCRYSTALLINE SI-H,CL FILMS
    AUGELLI, V
    MURRI, R
    LIGONZO, T
    [J]. APPLIED PHYSICS LETTERS, 1983, 43 (03) : 266 - 267
  • [3] PHYSICAL CHARACTERIZATION OF HALOGENATED AND HYDROGENATED AMORPHOUS-SILICON FILMS
    AUGELLI, V
    MURRI, R
    GALASSINI, S
    TEPORE, A
    [J]. THIN SOLID FILMS, 1980, 69 (03) : 315 - 320
  • [4] DARK CONDUCTIVITY IN AMORPHOUS UNDOPED SILICON FILMS
    AUGELLI, V
    MURRI, R
    [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 57 (02) : 225 - 240
  • [5] HALL-MOBILITY IN DOPED SI-H, CL FILMS
    AUGELLI, V
    MURRI, R
    LIGONZO, T
    [J]. THIN SOLID FILMS, 1984, 116 (04) : 311 - 315
  • [6] RF PLASMA DEPOSITION OF AMORPHOUS-SILICON FILMS FROM SICL4-H2
    BRUNO, G
    CAPEZZUTO, P
    CRAMAROSSA, F
    DAGOSTINO, R
    [J]. THIN SOLID FILMS, 1980, 67 (01) : 103 - 107
  • [7] DOPING OF MICROCRYSTALLINE SI-H,CL FILMS IN RF GLOW-DISCHARGE
    BRUNO, G
    CAPEZZUTO, P
    CRAMAROSSA, F
    BARBAROSSA, V
    AUGELLI, V
    MURRI, R
    [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) : 815 - 818
  • [8] BRUNO G, 1984, 1984 P EUR MAT RES S, P479
  • [9] CAPEZZUTO P, 1983, 6TH P INT S PLASM CH, P814
  • [10] PREPARATION AND CHARACTERISTICS OF A-SI-CL-H FILMS
    CHEN, ZM
    LIAO, XB
    KONG, GL
    [J]. SOLAR ENERGY MATERIALS, 1982, 7 (02): : 149 - 152