GROWTH OF SEMICONDUCTOR INSULATOR STRUCTURES - GAAS/FLUORIDE/GAAS (001)

被引：37

作者：

SULLIVAN, PW ^{[1
]}

BOWER, JE ^{[1
]}

METZE, GM ^{[1
]}

机构：

[1] MIT,LINCOLN LAB,LEXINGTON,MA 02173

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 02期

关键词：

D O I：

10.1116/1.583306

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：500 / 507

页数：8

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