MATERIAL CONSTANTS OF NEW PIEZOELECTRIC TA2O5 THIN-FILMS

被引：51

作者：

NAKAGAWA, Y

OKADA, T

机构：

[1] Faculty of Engineering, Yamanashi University, Kofu 400

来源：

JOURNAL OF APPLIED PHYSICS | 1990年 / 68卷 / 02期

关键词：

D O I：

10.1063/1.346828

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The first measurement of the material constants of Ta2O 5 thin films is described. x-axis-oriented Ta2O 5 thin films were deposited on fused quartz using the dc diode sputtering method. The material constants were determined from the phase velocity and the electromechanical coupling constant of the bulk waves and the surface acoustic waves propagating on the layered substrate.

引用

页码：556 / 559

页数：4

共 10 条

[1]

Berry R.W., 1968, THIN FILM TECHNOLOGY

[2]

DIEULESAINT E, 1980, ELASTIC WAVES SOLIDS, P141

[3] CAPACITANCE AND FIELD DISTRIBUTIONS FOR INTERDIGITAL SURFACE-WAVE TRANSDUCERS [J].