SENSITIVITY CONTROL OF ISFETS BY CHEMICAL SURFACE MODIFICATION

被引:104
作者
VANDENBERG, A [1 ]
BERGVELD, P [1 ]
REINHOUDT, DN [1 ]
SUDHOLTER, EJR [1 ]
机构
[1] TWENTE UNIV TECHNOL,ORGAN CHEM LAB,7500 AE ENSCHEDE,NETHERLANDS
来源
SENSORS AND ACTUATORS | 1985年 / 8卷 / 02期
关键词
The authors wish to express then gratitude to the Twente Centre of Mlcroelectronlcs (C M E T ) for financial support of the ion-sensor research project;
D O I
10.1016/0250-6874(85)87010-4
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
32
引用
收藏
页码:129 / 148
页数:20
相关论文
共 32 条
[1]   ION-SENSITIVE FIELD-EFFECT TRANSISTORS WITH INORGANIC GATE OXIDE FOR PH SENSING [J].
AKIYAMA, T ;
UJIHIRA, Y ;
OKABE, Y ;
SUGANO, T ;
NIKI, E .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1982, 29 (12) :1936-1941
[2]  
Albert A., 1984, DETERMINATION IONIZA
[4]   THE OPERATION OF AN ISFET AS AN ELECTRONIC DEVICE [J].
BERGVELD, P .
SENSORS AND ACTUATORS, 1981, 1 (01) :17-29
[5]   CHEMICALLY MODIFIED SILICON DIOXIDE SURFACES REACTION OF N-ALKYLDIMETHYLSILANOLS AND N-OXAALKYL-DIMETHYLSILANOLS WITH HYDRATED SURFACE OF SILICON DIOXIDE-QUESTION OF LIMITING SURFACE CONCENTRATION [J].
BOKSANYI, L ;
LIARDON, O ;
KOVATS, ES .
ADVANCES IN COLLOID AND INTERFACE SCIENCE, 1976, 6 (02) :95-137
[6]   THE ROLE OF BURIED OH-SITES IN THE RESPONSE MECHANISM OF INORGANIC-GATE PH-SENSITIVE ISFETS [J].
BOUSSE, L ;
BERGVELD, P .
SENSORS AND ACTUATORS, 1984, 6 (01) :65-78
[7]  
Bousse L., 1982, THESIS ENSCHEDE
[8]   THE INFLUENCE OF THE PH ON THE ELECTROLYTE-SIO2-SI SYSTEM STUDIED BY ION-SENSITIVE FET MEASUREMENTS AND QUASISTATIC C-V MEASUREMENTS [J].
DEROOIJ, NF ;
BERGVELD, P .
THIN SOLID FILMS, 1980, 71 (02) :327-331
[9]   ELECTRONIC SEMICONDUCTING OXIDES AS PH SENSORS [J].
FOG, A ;
BUCK, RP .
SENSORS AND ACTUATORS, 1984, 5 (02) :137-146
[10]   CHEMICALLY MODIFIED PARYLENE GATE FIELD-EFFECT TRANSISTORS - PREPARATION OF PH INSENSITIVE PARYLENE GATE FOR CHEMICAL MODIFICATION [J].
FUJIHIRA, M ;
FUKUI, M ;
OSA, T .
JOURNAL OF ELECTROANALYTICAL CHEMISTRY, 1980, 106 (1-2) :413-418