DOUBLE DETECTION MICROSCOPE - STOM-AFM, PRINCIPLE AND RESULTS

被引:4
作者
BAIDA, F
MERED, C
COURJON, D
机构
来源
MICROSCOPY MICROANALYSIS MICROSTRUCTURES | 1994年 / 5卷 / 01期
关键词
D O I
10.1051/mmm:019940050101900
中图分类号
TH742 [显微镜];
学科分类号
摘要
Near field optical microscopy provides a high resolved map of the light intensity very close to the object surface. This intensity is directly correlated with the profile and with the physicochemical nature of the material constituting the object. A hybrid microscope has been built to partially decorrelate these data. It combines an AFM (Atomic Force Microscopy) detection with a STOM (Scanning Tunneling Optical Microscopy) detection. The information can be obtained simultaneously or sequentially on the same scanned area. After a technical description of the realized device, we will conclude by presenting the first results.
引用
收藏
页码:19 / 29
页数:11
相关论文
共 10 条
[1]  
BAIDA F, 1992, NATO SERIES E, V242, P71
[2]   IMAGING OF SUBMICRON INDEX VARIATIONS BY SCANNING OPTICAL TUNNELING [J].
COURJON, D ;
BAINIER, C ;
SPAJER, M .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06) :2436-2439
[3]   OPTICAL CONSTANTS OF NOBLE METALS [J].
JOHNSON, PB ;
CHRISTY, RW .
PHYSICAL REVIEW B, 1972, 6 (12) :4370-4379
[4]  
MOERS MPH, 1992, NFO P E, V242, P79
[5]   ABSORPTION IN SILICON-NITRIDE FILMS [J].
NAZAR, FM .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1979, 18 (06) :1181-1182
[6]   OPTICAL STETHOSCOPY - IMAGE RECORDING WITH RESOLUTION LAMBDA/20 [J].
POHL, DW ;
DENK, W ;
LANZ, M .
APPLIED PHYSICS LETTERS, 1984, 44 (07) :651-653
[7]  
PORTE L, 1992, SPECTRA 2000, V164, P40
[8]   NEAR-FIELD DIFFERENTIAL SCANNING OPTICAL MICROSCOPE WITH ATOMIC FORCE REGULATION [J].
TOLEDOCROW, R ;
YANG, PC ;
CHEN, Y ;
VAEZIRAVANI, M .
APPLIED PHYSICS LETTERS, 1992, 60 (24) :2957-2959
[9]  
VANHULST NF, 1992, P SOC PHOTO-OPT INS, V1639, P36, DOI 10.1117/12.58190
[10]   POLYNOMIAL FORMULATION OF REFLECTION AND TRANSMISSION BY STRATIFIED PLANAR STRUCTURES [J].
VIGOUREUX, JM .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1991, 8 (11) :1697-1701