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CHARACTERIZATION OF MATERIALS BY SECONDARY ION MASS-SPECTROMETRY (SIMS) - NEW POSSIBILITIES OF TRACE, MICRO AND SURFACE-ANALYSIS
被引:14
作者
:
GRASSERBAUER, M
论文数:
0
引用数:
0
h-index:
0
GRASSERBAUER, M
STINGEDER, G
论文数:
0
引用数:
0
h-index:
0
STINGEDER, G
PIMMINGER, M
论文数:
0
引用数:
0
h-index:
0
PIMMINGER, M
机构
:
来源
:
FRESENIUS ZEITSCHRIFT FUR ANALYTISCHE CHEMIE
|
1983年
/ 315卷
/ 07期
关键词
:
D O I
:
10.1007/BF00487503
中图分类号
:
O65 [分析化学];
学科分类号
:
070302 ;
081704 ;
摘要
:
引用
收藏
页码:575 / 590
页数:16
相关论文
共 79 条
[1]
ION MICROPROBE MASS ANALYZER
ANDERSEN, CA
论文数:
0
引用数:
0
h-index:
0
ANDERSEN, CA
HINTHORNE, JR
论文数:
0
引用数:
0
h-index:
0
HINTHORNE, JR
[J].
SCIENCE,
1972,
175
(4024)
: 853
-
+
[2]
THERMODYNAMIC APPROACH TO QUANTITATIVE INTERPRETATION OF SPUTTERED ION MASS-SPECTRA
ANDERSEN, CA
论文数:
0
引用数:
0
h-index:
0
机构:
HASLER RES CTR, APPL RES LABS, GOLETA, CA 93017 USA
HASLER RES CTR, APPL RES LABS, GOLETA, CA 93017 USA
ANDERSEN, CA
HINTHORNE, JR
论文数:
0
引用数:
0
h-index:
0
机构:
HASLER RES CTR, APPL RES LABS, GOLETA, CA 93017 USA
HASLER RES CTR, APPL RES LABS, GOLETA, CA 93017 USA
HINTHORNE, JR
[J].
ANALYTICAL CHEMISTRY,
1973,
45
(08)
: 1421
-
1438
[3]
MODELS FOR COMPUTER-SIMULATION OF COMPLETE IC FABRICATION PROCESS
ANTONIADIS, DA
论文数:
0
引用数:
0
h-index:
0
机构:
STANFORD UNIV,INTEGRATED CIRCUITS LAB,STANFORD,CA 94305
STANFORD UNIV,INTEGRATED CIRCUITS LAB,STANFORD,CA 94305
ANTONIADIS, DA
DUTTON, RW
论文数:
0
引用数:
0
h-index:
0
机构:
STANFORD UNIV,INTEGRATED CIRCUITS LAB,STANFORD,CA 94305
STANFORD UNIV,INTEGRATED CIRCUITS LAB,STANFORD,CA 94305
DUTTON, RW
[J].
IEEE TRANSACTIONS ON ELECTRON DEVICES,
1979,
26
(04)
: 490
-
500
[4]
ISS-SIMS CHARACTERIZATION OF UV-O3 CLEANED SURFACES
BAUN, WL
论文数:
0
引用数:
0
h-index:
0
BAUN, WL
[J].
APPLIED SURFACE SCIENCE,
1980,
6
(01)
: 39
-
46
[5]
OBSERVATION ON SURFACE-REACTIONS WITH STATIC METHOD OF SECONDARY ION MASS-SPECTROMETRY .1. METHOD
BENNINGHOVEN, A
论文数:
0
引用数:
0
h-index:
0
BENNINGHOVEN, A
[J].
SURFACE SCIENCE,
1971,
28
(02)
: 541
-
+
[6]
BENNINGHOVEN A, 1982, SIMS, V3
[7]
BENNINGHOVEN A, 1979, SIMS, V2
[8]
BERNETT MK, 1981, ASLE TRANS, V24, P98
[9]
BLATTNER RJ, 1980, SCANNING ELECTRON MI, V4, P55
[10]
BOUMAN R, 1979, SURFACE CONTAMINATIO
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共 79 条
[1]
ION MICROPROBE MASS ANALYZER
ANDERSEN, CA
论文数:
0
引用数:
0
h-index:
0
ANDERSEN, CA
HINTHORNE, JR
论文数:
0
引用数:
0
h-index:
0
HINTHORNE, JR
[J].
SCIENCE,
1972,
175
(4024)
: 853
-
+
[2]
THERMODYNAMIC APPROACH TO QUANTITATIVE INTERPRETATION OF SPUTTERED ION MASS-SPECTRA
ANDERSEN, CA
论文数:
0
引用数:
0
h-index:
0
机构:
HASLER RES CTR, APPL RES LABS, GOLETA, CA 93017 USA
HASLER RES CTR, APPL RES LABS, GOLETA, CA 93017 USA
ANDERSEN, CA
HINTHORNE, JR
论文数:
0
引用数:
0
h-index:
0
机构:
HASLER RES CTR, APPL RES LABS, GOLETA, CA 93017 USA
HASLER RES CTR, APPL RES LABS, GOLETA, CA 93017 USA
HINTHORNE, JR
[J].
ANALYTICAL CHEMISTRY,
1973,
45
(08)
: 1421
-
1438
[3]
MODELS FOR COMPUTER-SIMULATION OF COMPLETE IC FABRICATION PROCESS
ANTONIADIS, DA
论文数:
0
引用数:
0
h-index:
0
机构:
STANFORD UNIV,INTEGRATED CIRCUITS LAB,STANFORD,CA 94305
STANFORD UNIV,INTEGRATED CIRCUITS LAB,STANFORD,CA 94305
ANTONIADIS, DA
DUTTON, RW
论文数:
0
引用数:
0
h-index:
0
机构:
STANFORD UNIV,INTEGRATED CIRCUITS LAB,STANFORD,CA 94305
STANFORD UNIV,INTEGRATED CIRCUITS LAB,STANFORD,CA 94305
DUTTON, RW
[J].
IEEE TRANSACTIONS ON ELECTRON DEVICES,
1979,
26
(04)
: 490
-
500
[4]
ISS-SIMS CHARACTERIZATION OF UV-O3 CLEANED SURFACES
BAUN, WL
论文数:
0
引用数:
0
h-index:
0
BAUN, WL
[J].
APPLIED SURFACE SCIENCE,
1980,
6
(01)
: 39
-
46
[5]
OBSERVATION ON SURFACE-REACTIONS WITH STATIC METHOD OF SECONDARY ION MASS-SPECTROMETRY .1. METHOD
BENNINGHOVEN, A
论文数:
0
引用数:
0
h-index:
0
BENNINGHOVEN, A
[J].
SURFACE SCIENCE,
1971,
28
(02)
: 541
-
+
[6]
BENNINGHOVEN A, 1982, SIMS, V3
[7]
BENNINGHOVEN A, 1979, SIMS, V2
[8]
BERNETT MK, 1981, ASLE TRANS, V24, P98
[9]
BLATTNER RJ, 1980, SCANNING ELECTRON MI, V4, P55
[10]
BOUMAN R, 1979, SURFACE CONTAMINATIO
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5
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→