CHARACTERIZATION OF MATERIALS BY SECONDARY ION MASS-SPECTROMETRY (SIMS) - NEW POSSIBILITIES OF TRACE, MICRO AND SURFACE-ANALYSIS

被引:14
作者
GRASSERBAUER, M
STINGEDER, G
PIMMINGER, M
机构
来源
FRESENIUS ZEITSCHRIFT FUR ANALYTISCHE CHEMIE | 1983年 / 315卷 / 07期
关键词
D O I
10.1007/BF00487503
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
引用
收藏
页码:575 / 590
页数:16
相关论文
共 79 条
[61]  
SIGMON TW, 1979, SIMS, V2, pS80
[62]  
SOLOMON JS, 1980, AFWALTR804105 U DAYT
[63]  
STEIGER W, MIKROCHIM ACTA S, V10
[64]   QUANTITATIVE DISTRIBUTION ANALYSIS OF DOPANT ELEMENTS IN SILICON WITH SIMS FOR THE IMPROVEMENT OF PROCESS MODELING [J].
STINGEDER, G ;
GRASSERBAUER, M ;
GUERRERO, E ;
POTZL, H ;
TIELERT, R .
FRESENIUS ZEITSCHRIFT FUR ANALYTISCHE CHEMIE, 1983, 314 (03) :304-308
[65]  
STINGEDER G, 1983, THESIS TU WIEN
[66]  
TOLG G, 1981, NATURE AIM METHODS M
[67]  
TRAXLMAYR U, 1983, DEPTH PROFILES CR SI
[68]   SURFACE-ANALYSIS - X-RAY PHOTO-ELECTRON SPECTROSCOPY, AUGER-ELECTRON SPECTROSCOPY, AND SECONDARY ION MASS-SPECTROMETRY [J].
TURNER, NH ;
COLTON, RJ .
ANALYTICAL CHEMISTRY, 1982, 54 (05) :R293-R322
[69]  
VONCRIEGERN R, 1983, FRESEN Z ANAL CHEM, V314, P293
[70]  
VONROSENSTIEL AP, 1981, BEITR ELECTRONENMICR, V14, P153