共 79 条
[61]
SIGMON TW, 1979, SIMS, V2, pS80
[62]
SOLOMON JS, 1980, AFWALTR804105 U DAYT
[63]
STEIGER W, MIKROCHIM ACTA S, V10
[64]
QUANTITATIVE DISTRIBUTION ANALYSIS OF DOPANT ELEMENTS IN SILICON WITH SIMS FOR THE IMPROVEMENT OF PROCESS MODELING
[J].
FRESENIUS ZEITSCHRIFT FUR ANALYTISCHE CHEMIE,
1983, 314 (03)
:304-308
[65]
STINGEDER G, 1983, THESIS TU WIEN
[66]
TOLG G, 1981, NATURE AIM METHODS M
[67]
TRAXLMAYR U, 1983, DEPTH PROFILES CR SI
[69]
VONCRIEGERN R, 1983, FRESEN Z ANAL CHEM, V314, P293
[70]
VONROSENSTIEL AP, 1981, BEITR ELECTRONENMICR, V14, P153