A KINETIC-MODEL OF PULSED SHEATHS

被引：7

作者：

KEITER, ER ^{[1
]}

HITCHON, WNG ^{[1
]}

GOECKNER, MJ ^{[1
]}

机构：

[1] UNIV WISCONSIN, ENGN RES CTR PLASMA AIDED MFG, MADISON, WI 53706 USA

来源：

PHYSICS OF PLASMAS | 1994年 / 1卷 / 11期

关键词：

D O I：

10.1063/1.870906

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

The ion distribution function is calculated as a function of time, self-consistently with the electrostatic potential in two spatial coordinates for a pulsed sheath experiment. Such pulsed sheaths are used for a variety of purposes, including modification of material surfaces. The accuracy of the model is established by comparing the time varying ion density with experimental measurements. Additionally, the first reported prediction of the ion velocity distribution in this kind of pulsed sheath is given. This is important because the velocity distribution of the ions striking the surface determines how the surface material is modified.

引用

页码：3709 / 3712

页数：4

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