CONFOCAL SURFACE PROFILING UTILIZING CHROMATIC ABERRATION

被引：87

作者：

BROWNE, MA

AKINYEMI, O

BOYDE, A

机构：

[1] UNIV MANCHESTER,INST SCI & TECHNOL,DEPT INSTRUMENTAT & ANALYT SCI,MANCHESTER M60 1QD,LANCS,ENGLAND

[2] UNIV LONDON UNIV COLL,DEPT ANAT,LONDON WC1E 6BT,ENGLAND

来源：

SCANNING | 1992年 / 14卷 / 03期

关键词：

D O I：

10.1002/sca.4950140304

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A new method for surface profiling in the confocal microscope utilizing chromatic aberration is presented. An expression for the integrated spectral intensity in the new profilometer is derived and chromatic aberration in the confocal microscope is explained. Estimates of the minimum resolvable depth and the maximum depth that can be profiled are given utilizing a ratiometric signal detection scheme. Examples of ratio images illustrating the new surface profiling technique are presented, showing the scheme to be both simple to implement and effective.

引用

页码：145 / 153

页数：9

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