IMPLANTATION PHASES IN SOLIDS

被引:8
作者
PAVLOV, PV
机构
来源
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期
关键词
D O I
10.1016/0167-5087(83)90883-9
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:791 / 798
页数:8
相关论文
共 18 条
[11]   ROLE OF RADIATION-DAMAGE IN CRYSTALLIZATION KINETICS OF THIN AMORPHOUS DIELECTRIC LAYERS [J].
PAVLOV, PV ;
GENKINA, NA ;
SHITOVA, EV ;
TETELBAUM, DI .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1975, 29 (01) :303-307
[12]  
PAVLOV PV, 1981, DOKL AKAD NAUK SSSR+, V258, P617
[13]  
PAVLOV PV, 1981, INTERACTION PARTICUL, P10
[14]  
PAVLOV PV, 1967, DOKL AKAD NAUK SSSR, V75, P823
[15]  
PAVLOV PV, 1975, P INT C ION DOPING S
[16]   ON THE CRYSTAL STRUCTURES OF THE NITRIDES OF SILICON AND GERMANIUM [J].
RUDDLESDEN, SN ;
POPPER, P .
ACTA CRYSTALLOGRAPHICA, 1958, 11 (07) :465-468
[17]  
Swanson M. L., 1971, Radiation Effects, V9, P249, DOI 10.1080/00337577108231056
[18]  
Turkdogan E.T., 1958, J APPL CHEM, V8, P296