PRACTICAL ENERGY SCALE CALIBRATION PROCEDURE FOR AUGER-ELECTRON SPECTROMETERS USING A SPECTROMETER OFFSET FUNCTION

被引：5

作者：

FUJITA, D

YOSHIHARA, K

机构：

[1] National Research Institute for Metals, Tsukuba-Shi, 305

来源：

SURFACE AND INTERFACE ANALYSIS | 1994年 / 21卷 / 04期

关键词：

D O I：

10.1002/sia.740210403

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In order to share AES spectral data and to develop an Auger spectra database, a practical and simple procedure for calibratiing the energy scale of Auger electron spectrometers has been developed. The procedure is based on the use of a spectrometer offset function, which enables transformation of measurements on the uncalibrated energy scale to a Fermi-level-referenced energy scale. In order to evaluate the effectiveness of this calibration method, a round-robin test involving twelve spectrometers of various types has been performed. From a comparison of NiL3VV and M3VV peak positions, it was found that the scatter among the measurements after calibration was reduced to 20-30% of the scatter before calibration.

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页码：226 / 230

页数：5

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