THE ROLE OF OXYGEN IN SILICON FOR VLSI

被引：5

作者：

BENSON, KE

LIN, W

机构：

来源：

关键词：

D O I：

10.1016/0022-0248(84)90322-1

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：602 / 608

页数：7

共 45 条

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