TEMPERATURE AND THICKNESS DEPENDENCE OF THE RESISTIVITY OF THIN POLYCRYSTALLINE ALUMINUM, COBALT, NICKEL, PALLADIUM, SILVER AND GOLD-FILMS

被引：134

作者：

DEVRIES, JWC

机构：

[1] Philips Research Lab, Netherlands

来源：

THIN SOLID FILMS | 1988年 / 167卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(88)90478-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

17

引用

收藏

页码：25 / 32

页数：8

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共 18 条

[1] PROPERTIES OF PD/AU THIN-FILM LAYERED STRUCTURES
CARCIA, PF
SUNA, A
[J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (04) : 2000 - 2005
[2] CHOPRA KL, 1985, THIN FILM PHENOMENA, P369
[3] ELECTRICAL-RESISTIVITY OF ALUMINUM AND MANGANESE
DESAI, PD
JAMES, HM
HO, CY
[J]. JOURNAL OF PHYSICAL AND CHEMICAL REFERENCE DATA, 1984, 13 (04) : 1131 - 1172
[4] TEMPERATURE-DEPENDENT RESISTIVITY MEASUREMENTS ON POLYCRYSTALLINE SIO2-COVERED THIN NICKEL FILMS
DEVRIES, JWC
[J]. THIN SOLID FILMS, 1987, 150 (2-3) : 209 - 215
[5] TEMPERATURE-DEPENDENT RESISTIVITY MEASUREMENTS ON POLYCRYSTALLINE SIO2-COVERED THIN GOLD-FILMS
DEVRIES, JWC
[J]. THIN SOLID FILMS, 1987, 150 (2-3) : 201 - 208
[6] RESISTIVITY OF THIN AU FILMS AS A FUNCTION OF GRAIN DIAMETER AND TEMPERATURE
DEVRIES, JWC
[J]. JOURNAL OF PHYSICS F-METAL PHYSICS, 1987, 17 (09): : 1945 - 1952
[7] SURFACE SCATTERING IN THIN EVAPORATED GOLD DOUBLE-LAYERS STUDIED BY INSITU RESISTIVITY MEASUREMENTS
DEVRIES, JWC
[J]. JOURNAL OF PHYSICS F-METAL PHYSICS, 1987, 17 (12): : 2403 - 2409
[8] The conductivity of thin metallic films according to the electron theory of metals
Fuchs, K
[J]. PROCEEDINGS OF THE CAMBRIDGE PHILOSOPHICAL SOCIETY, 1938, 34 : 100 - 108
[9] ELECTRICAL-RESISTIVITY OF COPPER, GOLD, PALLADIUM, AND SILVER
MATULA, RA
[J]. JOURNAL OF PHYSICAL AND CHEMICAL REFERENCE DATA, 1979, 8 (04) : 1147 - 1298
[10] ELECTRICAL RESISTIVITY MODEL FOR POLYCRYSTALLINE FILMS - CASE OF SPECULAR REFLECTION AT EXTERNAL SURFACES
MAYADAS, AF
SHATZKES, M
JANAK, JF
[J]. APPLIED PHYSICS LETTERS, 1969, 14 (11) : 345 - &