PREPARATION AND CHARACTERIZATION OF MGO THIN-FILMS DEPOSITED BY SPRAY PYROLYSIS OF MG(2,4-PENTANEDIONATE)2

被引：18

作者：

DESISTO, WJ

HENRY, RL

机构：

[1] Electronics Science and Technology Division, Naval Research Laboratory, Washimgton DC

来源：

JOURNAL OF CRYSTAL GROWTH | 1991年 / 109卷 / 1-4期

关键词：

D O I：

10.1016/0022-0248(91)90196-C

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Thin films of magnesia (0.1 - 0.5-mu-m) were deposited by a spray pyrolysis method. Aqueous and alcoholic solutions of magnesium (2,4-pentanedionate)2 were ultrasonically nebulized and thermally decomposed onto a variety of substrates at temperatures between 400 and 540-degrees-C. Strong (100) orientation of MgO was observed on alumina coated sapphire as deposited from alcoholic solutions at 470-degrees-C. In addition, strong (100) orientation was observed on samples prepared from thermally decomposing aqueous solutions on sapphire followed by oxygen anneals at 700 and 93-degrees-C.

引用

页码：314 / 317

页数：4

共 10 条

[1]

ALBIN DS, 1987, ADV CERAM MATER, V2, P243

[2]

AO YM, 1989, MATER RES B, V24, P1215

[3] THIN-LAYERS DEPOSITED BY THE PYROSOL PROCESS [J].