LASER-INDUCED MORPHOLOGY CHANGES IN THIN COPPER-FILMS

被引：11

作者：

BLOCH, J

ZEIRI, Y

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 07期

关键词：

D O I：

10.1063/1.337894

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2637 / 2644

页数：8

共 26 条

[1] DYNAMICS OF LASER-INDUCED FORMATION OF PALLADIUM SILICIDE [J].

ALLMEN, MV ;

WITTMER, M .

APPLIED PHYSICS LETTERS, 1979, 34 (01) :68-70

[2]

ANDERSON CL, 1980, P LASER ELECTRON BEA

[3]

BONCHBRUEVICH AM, 1968, SOV PHYS TECH PHYS-U, V13, P640

[4]

CELLER GK, 1981, P LASER ELECTRON BEA, P435

[5] LASER MIRROR DAMAGE IN GERMANIUM AT 10.6 MU [J].

EMMONY, DC ;

HOWSON, RP ;

WILLIS, LJ .

APPLIED PHYSICS LETTERS, 1973, 23 (11) :598-600

[6] SILICON DIODES MADE BY LASER IRRADIATION [J].

FAIRFIELD, JM ;

SCHWUTTKE, GH .

SOLID-STATE ELECTRONICS, 1968, 11 (12) :1175-+

[7] SURFACE RIPPLES ON SILICON AND GALLIUM-ARSENIDE UNDER PICOSECOND LASER ILLUMINATION [J].

FAUCHET, PM ;

SIEGMAN, AE .

APPLIED PHYSICS LETTERS, 1982, 40 (09) :824-826

[8]

FERRIS SD, 1979, P AIP C LASER SOLID

[9] CO2 LASER-PRODUCED RIPPLE PATTERNS ON NIXP1-X SURFACES [J].

ISENOR, NR .

APPLIED PHYSICS LETTERS, 1977, 31 (03) :148-150

[10] PERIODIC SURFACE RIPPLES IN LASER-TREATED ALUMINUM AND THEIR USE TO DETERMINE ABSORBED POWER [J].

JAIN, AK ;

KULKARNI, VN ;

SOOD, DK ;

UPPAL, JS .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (07) :4882-4884

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