VALIDITY OF SELF-BIAS VOLTAGE MEASUREMENTS ON INSULATING ELECTRODES IN RADIO-FREQUENCY DRY ETCHING SYSTEMS

被引：14

作者：

DEVRIES, CAM

VANDENHOEK, WGM

机构：

来源：

关键词：

D O I：

10.1063/1.335968

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2074 / 2076

页数：3

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[2]

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[3]

EPHRATH LM, 1982, ELECTROCHEMICAL S PV, V827, P108

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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (01) :60-68

[5] ELECTRICAL-PROPERTIES OF RF SPUTTERING SYSTEMS [J].

KELLER, JH ;

PENNEBAKER, WB .

[6]

POLAK SJ, 1979, P NASECODE, V1, P149

[7] ELECTRICAL-PROPERTIES OF PLANAR RF DISCHARGES FOR DRY ETCHING [J].

VANROOSMALEN, AJ ;

VANDENHOEK, WGM ;

KALTER, H .