A PRECISE AND AUTOMATIC VERY LARGE-SCALE INTEGRATED-CIRCUIT PATTERN LINEWIDTH MEASUREMENT METHOD USING A SCANNING ELECTRON-MICROSCOPE

被引：16

作者：

MIYOSHI, M

KANOH, M

YAMAJI, H

OKUMURA, K

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1986年 / 4卷 / 02期

关键词：

D O I：

10.1116/1.583408

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：493 / 499

页数：7

共 13 条

[1]

CONQUIST BE, 1980, MICROELECTRONICS MEA

[2] TOPOGRAPHIC INTENSITY PROFILES IN SCANNING ELECTRON MICROSCOPE CUBES [J].

GEORGE, EP ;

ROBINSON, VNE .

JOURNAL OF MICROSCOPY-OXFORD, 1975, 105 (DEC) :289-298

[3]

JENSEN S, 1980, SCANNING ELECTRON MI, V1, P393

[4]

KAWAMOTO H, 1984, SCANNING ELECTRON MI, V1, P15

[5]

MIYOSHI M, 1982, SCANNING ELECTRON MI, V4, P1507

[6] MEASUREMENTS OF DEEP PENETRATION OF LOW-ENERGY ELECTRONS INTO METAL-OXIDE-SEMICONDUCTOR STRUCTURE [J].

NAKAMAE, K ;

FUJIOKA, H ;

URA, K .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (03) :1306-1308

[7]

Nyyssonen D., 1979, Proceedings of the Society of Photo-Optical Instrumentation Engineers, V194, P34

[8]

POSTEK MT, 1984, SCANNING ELECTRON MI, V3, P1065

[9]

RUSSELL PE, 1984, P SOC PHOTO-OPT INST, V480, P101, DOI 10.1117/12.943054

[10] SMOOTHING + DIFFERENTIATION OF DATA BY SIMPLIFIED LEAST SQUARES PROCEDURES [J].

SAVITZKY, A ;

GOLAY, MJE .

ANALYTICAL CHEMISTRY, 1964, 36 (08) :1627-&

← 1 2 →