SURFACE-ROUGHNESS AND GRAIN-BOUNDARY EFFECTS ON THE OPTICAL-PROPERTIES OF LOW-PRESSURE CHEMICAL-VAPOR-DEPOSITED SILICON THIN-FILMS BY SPECTROSCOPIC ELLIPSOMETRY

被引：55

作者：

LOGOTHETIDIS, S

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 06期

关键词：

D O I：

10.1063/1.343401

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2416 / 2426

页数：11

共 54 条

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