SURFACE-ROUGHNESS AND GRAIN-BOUNDARY EFFECTS ON THE OPTICAL-PROPERTIES OF LOW-PRESSURE CHEMICAL-VAPOR-DEPOSITED SILICON THIN-FILMS BY SPECTROSCOPIC ELLIPSOMETRY

被引：55

作者：

LOGOTHETIDIS, S

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 06期

关键词：

D O I：

10.1063/1.343401

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2416 / 2426

页数：11

共 54 条

[21] THE EFFECTS OF MICROCRYSTAL SIZE AND SHAPE ON THE ONE PHONON RAMAN-SPECTRA OF CRYSTALLINE SEMICONDUCTORS [J].

CAMPBELL, IH ;

FAUCHET, PM .

SOLID STATE COMMUNICATIONS, 1986, 58 (10) :739-741

[22] AN ELLIPSOMETRY STUDY OF A HYDROGENATED AMORPHOUS-SILICON BASED N-I STRUCTURE [J].

COLLINS, RW ;

CLARK, AH ;

GUHA, S ;

HUANG, CY .

JOURNAL OF APPLIED PHYSICS, 1985, 57 (10) :4566-4571

[23]

DESANTO JA, 1986, PROG OPTICS, V23, P1

[24] THEORY OF LIGHT-SCATTERING FROM A ROUGH-SURFACE WITH AN INHOMOGENEOUS DIELECTRIC PERMITTIVITY [J].

ELSON, JM .

PHYSICAL REVIEW B, 1984, 30 (10) :5460-5480

[25] ELECTRONIC-STRUCTURE AND OPTICAL-PROPERTIES OF POLYCRYSTALLINE CUBIC SEMICONDUCTORS [J].

GAVRILENKO, VI .

PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1987, 139 (02) :457-466

[26] OPTICAL-PROPERTIES OF ULTRAFINE GOLD PARTICLES [J].

GRANQVIST, CG ;

HUNDERI, O .

PHYSICAL REVIEW B, 1977, 16 (08) :3513-3534

[27]

HARBEKE G, 1985, SPRINGER SER SOLID S, V57, P156

[28] OPTICS OF ROUGH SURFACES, DISCONTINUOUS FILMS AND HETEROGENEOUS MATERIALS [J].

HUNDERI, O .

SURFACE SCIENCE, 1980, 96 (1-3) :1-31

[29] THIN-FILM OPTICAL-PROPERTIES IN RELATION TO FILM STRUCTURE [J].

HUNDERI, O .

THIN SOLID FILMS, 1979, 57 (01) :15-32

[30]

HURT HH, 1985, APPL OPTICS, V24, P2721

← 1 2 3 4 5 6 →