POLBENZIMIDAZOLE AS A THERMALLY STABLE LANGMUIR-BLODGETT-FILM INSULATOR IN INP METAL-INSULATOR-SEMICONDUCTOR DEVICES

被引：12

作者：

FOWLER, MT

SUZUKI, M

ENGEL, AK

ASANO, K

ITOH, T

机构：

[1] SOPHIA UNIV,DEPT CHEM,JAPAN RES & DEV CORP,CHIYODA KU,TOKYO 102,JAPAN

[2] NEC CORP,MICROELECTR RES LABS,MIYAMAE KU,KAWASAKI,KANAGAWA 213,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 08期

关键词：

D O I：

10.1063/1.339307

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：3427 / 3431

页数：5

相关论文

共 20 条

[1] PHTHALOCYANINE LANGMUIR BLODGETT-FILM GAS DETECTOR
BAKER, S
ROBERTS, GG
PETTY, MC
[J]. IEE PROCEEDINGS-I COMMUNICATIONS SPEECH AND VISION, 1983, 130 (05): : 260 - 263
[2] THE PREPARATION AND PROPERTIES OF STABLE METAL-FREE PHTHALOCYANINE LANGMUIR-BLODGETT FILMS
BAKER, S
PETTY, MC
ROBERTS, GG
TWIGG, MV
[J]. THIN SOLID FILMS, 1983, 99 (1-3) : 53 - 59
[3] BAKER S, 1985, THESIS U DURHAM
[4] Interface properties of MIS structures prepared by plasma oxidation of n-InP
Bouchikhi, B.
Michel, C.
Valmont, G.
Ravelet, S.
Lepley, B.
[J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1986, 1 (02) : 143 - 149
[5] THE STUDY OF METAL-INSULATOR SEMICONDUCTOR STRUCTURES WITH LANGMUIR-BLODGETT INSULATORS
DEWA, AS
FUNG, CD
DIPOTO, EP
RICKERT, SE
[J]. THIN SOLID FILMS, 1985, 132 (1-4) : 27 - 32
[6] ENGEL AK, 1986, IN PRESS 3RD P INT S
[7] ENGEL AK, 1986, POLYM MATER SCI ENG, V54, P119
[8] THE DEPOSITION OF LANGMUIR-BLODGETT FILMS CONTAINING PURPLE MEMBRANE ON LIPID-IMPREGNATED AND PARAFFIN-IMPREGNATED FILTERS
FLANAGAN, MT
[J]. THIN SOLID FILMS, 1983, 99 (1-3) : 133 - 138
[9] PLANAR SILICON FIELD-EFFECT TRANSISTORS WITH LANGMUIR-BLODGETT GATE INSULATORS
FUNG, CD
LARKINS, GL
[J]. THIN SOLID FILMS, 1985, 132 (1-4) : 33 - 39
[10] ITOH T, 1986, 18TH SOL STAT DEV MA, V779